Banerji, N., Serra, J., Chiussi, S., Lusquiños, F., León, B., & Pérez-Amor, M. (1998). a-SiN:H films modified by ArF excimer laser irradiation. Revista De Metalurgia, 34(2), 164–169. https://doi.org/10.3989/revmetalm.1998.v34.i2.682