Surface modification of Ti-6AI-4V alloy with Ti-C/Ti-N/Ti multilayered film by magnetron DC sputtering
DOI:
https://doi.org/10.3989/revmetalm.2004.v40.i6.298Keywords:
Multi-layered film, adhesion, titanium alloy, abrasion resistance,Abstract
Coating of Ti-6A1-4V alloy with Ti-C/Ti-N/Ti multi-layered films was examined by magnetron DC sputtering, aiming at the application of the alloy to artificial joints, in order to improve not only the biocompatibility and the abrasion resistance of the alloy but also the adhesion between the deposited film and the alloy, preserving the high hardness of such ceramic coatings. According to AES in-depth profiles, it was confirmed that a Ti-C/Ti- N/Ti multi-layered film had formed on the alloy. The multi-layered film appeared to be uniform and adhesive while Ti-C monolithic film deposited directly onto the alloy peeled off partly, concluding that the multi-layered film was more adhesive to the alloy than the monolithic film.
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