Pulsed laser deposition of Al2O3 thin film on silicon

Abstract

Al₂O₃ thin films were fabricated by pulsed laser deposition (PLD) on Si₃N₄/Si, to improve the thermal and electrical isolation of gas sensing devices. The microstructure of the films is analyzed as a function of the deposition conditions (laser fluence, oxygen pressure, target-substrate distance and substrate temperature). X-ray analysis shows that only a sharp peak that coincides with the corundum (116) reflection can be observed in all the films. But, when they are annealed at temperatures above 1,200°C, a change in the crystalline structure of some films occurs. The stoichiometry and morphology of the films with and without thermal treatment are compared using environmental scanning electron microscopy (SEM) and EDAX analysis.