Silicon superficial texturing bypulsed laser
DOI:
https://doi.org/10.3989/revmetalm.1998.v34.i2.678Keywords:
Laser, Texturing, Silicon, Reflectance, LIPSSAbstract
Texturing of silicon surfaces with pulsed laser is made. The method is based on the formation of laser- induced periodic surface structure (LIPSS). The process is temporary characterized through the dynamic reflectance, thus determining the formation threshold of the structure. Relation between the different textures and the spectral reflectance of the samples before and after the treatment is also characterized. The mean value of spectral reflectance decreases up to a 6 %.
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